Reflecting apparatus

Details Reflecting apparatus Reflecting apparatus

2011-03-15

2011-03-15

Stultz, Jessica T (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

Reexamination Certificate

active

07907326

ABSTRACT:
A reflecting apparatus that includes a mirror having an axis. A holding unit holds the mirror via an elastic member. A first actuator positions the mirror by driving the holding unit. A second actuator deforms the mirror and includes a magnetic member attached to the mirror, and an electromagnet arranged to oppose the magnetic member. The electromagnet generates an attraction force between the magnetic member and the electromagnet. A base supports the electromagnet, and a spring interposed between the base and the mirror applies a force between the magnetic member and the electromagnet in a direction opposite to that of the attraction force. A rigidity of the spring in a direction parallel to the axis is less than that of the elastic member in the direction parallel to the axis.

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