Reflected light intensity ratio measuring device, device for...

Details Reflected light intensity ratio measuring device, device for... Reflected light intensity ratio measuring device, device for...

2006-06-30

2008-10-21

Epps, Georgia Y. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559100, C250S559400, C356S448000

Reexamination Certificate

active

07439534

ABSTRACT:
A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally laid between support pins of the wafer holding part, and a calibration standard member for calibration is placed on an upper surface of the support table. When a semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the semiconductor wafer, and the reflection intensity of the light is measured. When no semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the calibration standard member, whereby the calibration can be done at any time.

REFERENCES:
patent: 2005/0018196 (2005-01-01), Kusuda
patent: 2005-39213 (2005-02-01), None

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