Reflectance spectrophotometric apparatus with toroidal mirrors

Details Reflectance spectrophotometric apparatus with toroidal mirrors Reflectance spectrophotometric apparatus with toroidal mirrors

1998-05-15

1999-11-23

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrophotometer

356446, 25033907, 25033911, G01J 302, G01J 342

Patent

active

059910224

ABSTRACT:
An apparatus uses reflectance spectrophotometry to characterize a sample having any number of thin films. The apparatus uses two toroidal mirrors in an optical relay to direct light reflected by the sample to a spectrophotometer. A computer then analyzes the reflected spectrum to characterize the optical properties of the sample. The optical relay allows a range of angles of reflection from the sample, and has no chromatic aberration. The optical relay is also arranged so that the non-chromatic aberration is minimized. The sample is mounted on a movable stage so that different areas of the sample may be characterized. Furthermore, a deflector and a viewer are used to allow the operator of the apparatus to view the region of the sample under study.

REFERENCES:
patent: 3591287 (1971-07-01), Hannis
patent: 4784487 (1988-11-01), Hopkins
patent: 5045704 (1991-09-01), Coates

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