Reflectance spectrophotometric apparatus with optical relay

Details Reflectance spectrophotometric apparatus with optical relay Reflectance spectrophotometric apparatus with optical relay

1997-12-09

1999-03-09

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrophotometer

356326, 356371, 356381, G01J 302, G01J 342

Patent

active

058808310

ABSTRACT:
The invention comprises an apparatus for characterizing a thin film using the reflected spectrum of the film. The apparatus uses two toroidal mirrors in an optical relay to direct light onto the thin film and to direct reflected light from the film to a spectrophotometer. A computer then analyzes the reflected spectrum to characterize the optical properties of the thin film. The optical relay allows for a range of angles of incidence upon the sample, and has no chromatic aberration.

REFERENCES:
patent: 3022704 (1962-02-01), Cary
patent: 3157788 (1964-11-01), Roche
patent: 4453225 (1984-06-01), Ford
patent: 4740082 (1988-04-01), Young
patent: 4784487 (1988-11-01), Hopkins, II et al.
patent: 5214286 (1993-05-01), Milsevic et al.
patent: 5430634 (1995-07-01), Baker et al.
Sasian, J. et al., Double-curvature surfaces in mirror system design, Opt. Eng., vol. 36, No. 4. 1997.

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