Reflectance infrared microscope having high radiation throughput

Details Reflectance infrared microscope having high radiation throughput Reflectance infrared microscope having high radiation throughput

1991-06-03

1993-08-24

Lerner, Martin

Optical: systems and elements

Having significant infrared or ultraviolet property

Having folded optical path

356 73, 359355, 359388, G02B 1314, G02B 2104, G01N 2100

Patent

active

052394093

ABSTRACT:
An infrared microscope is disclosed which provides illumination for reflectance by the sample. This illumination follows a path through the objective toward the sample, and again, after reflection, through the objective toward the detector The reflectance illumination is directed toward the objective and sample by a fully reflective mirror, which injects approximately half of the interferometer beam into the microscope, and permits substantially all of the reflected beam to reach the detector.

REFERENCES:
patent: 4653880 (1987-03-01), Sting et al.
patent: 4712912 (1987-12-01), Messerschmidt
patent: 4786169 (1988-11-01), Brierley et al.
patent: 4852955 (1989-08-01), Doyle et al.
patent: 4878747 (1989-11-01), Sting et al.

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