Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-07-05
2011-07-05
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07973941
ABSTRACT:
A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead may include primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. In some embodiments, a zone grating type reference mark may be embedded in a periodic scale grating, and configured such that it provides strong reference mark primary signals without disrupting periodic incremental measurement signals associated with the periodic scale grating. In one embodiment, the readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers.
REFERENCES:
patent: 3985448 (1976-10-01), Wiklund
patent: 4492861 (1985-01-01), Kebschull
patent: 4573000 (1986-02-01), Nelle
patent: 5059791 (1991-10-01), Ishizuka
patent: 5073710 (1991-12-01), Takagi
patent: 5325176 (1994-06-01), Suda
patent: 5428445 (1995-06-01), Holzapfel
patent: 5678319 (1997-10-01), Huber
patent: 5739911 (1998-04-01), Holzapfel
patent: 5856872 (1999-01-01), Horwitz
patent: 5929789 (1999-07-01), Barbehenn
patent: 5981941 (1999-11-01), Takata
patent: 6175414 (2001-01-01), Holzapfel
patent: 6198534 (2001-03-01), Höfer
patent: 6229140 (2001-05-01), Ishizuka
patent: 6272403 (2001-08-01), Sugitani
patent: 6392224 (2002-05-01), Holzapfel
patent: 6472658 (2002-10-01), Mayer
patent: 6664535 (2003-12-01), Nahum
patent: 6906315 (2005-06-01), Tobiason
patent: 7053362 (2006-05-01), Tobiason et al.
patent: 7126696 (2006-10-01), Tobiason
patent: 7268883 (2007-09-01), Holzapfel
patent: 7289042 (2007-10-01), Gordon-Ingram
patent: 7324212 (2008-01-01), Mitchell
patent: 7348544 (2008-03-01), Atsuta
patent: 7571552 (2009-08-01), McAdam
patent: 2002/0014581 (2002-02-01), Yamamoto
patent: 2003/0047673 (2003-03-01), Thorburn
patent: 2004/0135077 (2004-07-01), Hane
patent: 2007/0227438 (2007-10-01), Howley
patent: 2008/0024789 (2008-01-01), Tobiason et al.
patent: 2009/0027692 (2009-01-01), Zwilling et al.
patent: 2009/0072130 (2009-03-01), Chase
patent: 2009/0127131 (2009-05-01), McFarland
patent: 2009/0135435 (2009-05-01), Zwilling et al.
Christensen O'Connor Johnson & Kindness PLLC
Lyons Michael A
Mitutoyo Corporation
LandOfFree
Reference signal generating configuration for an... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Reference signal generating configuration for an..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reference signal generating configuration for an... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2622721