Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Vacuum or hermetically sealed type
Patent
1992-09-25
1993-10-12
Donovan, Lincoln
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Vacuum or hermetically sealed type
H01H 166
Patent
active
052529363
ABSTRACT:
A switching operation for connection between plural measuring devices and plural DUTs is easily performed with a matrix of reed relays and connecting switches. The reed relay has a first guard pipe provided so as to cover a region extending from one end of the reed switch to the position adjacent to the contact point. A second guard pipe is provided so as to cover a region extending from the other end of the reed switch to a portion where the first guard pipe starts. When the reed relay is closed, and the first and second guard pipes are kept at the same potential as the signal line of the reed relay. On the other hand, when the reed relay is open, the guard connecting switch is also open. In this open switch case, the voltage at both terminals of the reed relay is ordinarily different. The signal lines of the reed switch at the measuring device side and the DUT side are respectively guarded by the first and second guard pipes.
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HP4062 U.S. Semiconductor Process Control System "System Library", Hewlett-Packard Company, Published Dec. 1988.
Norimatsu, Hideyuki, "High Speed Measurement of FET Vth at Low Id," Proc. IEEE 1989 Int. Conference on Microelectronic Test Structures, vol. 2, No. 1, Mar. 1989.
HP 4062C/UX Semiconductor Test System (product Note 4062-1), Hewlett-Packard Company, Printed Jul. 1990.
Donovan Lincoln
Hewlett--Packard Company
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