Reed contactor and process of fabricating suspended tridimension

Details Reed contactor and process of fabricating suspended tridimension Reed contactor and process of fabricating suspended tridimension

1993-12-14

1995-07-04

Donovan, Lincoln

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Vacuum or hermetically sealed type

335151, H01H 166

Patent

active

054304210

ABSTRACT:
A reed contactor includes a base plane comprising two distinct conducting zones. Two shafts of the contactor have the form of blades, each of which engages a base plane at the level of one of the conducting zones. One of the beams at least is supported on the base plane by means of a foot on which it is mounted in an overhanging manner. The contactor is formed by process comprising the steps of forming successively on a substrate an alternance of levels of photoresist and of metallization. At each step, the level of upper photoresist is configured to create in its thickness free growth spaces in which metal pins are formed by galvanic growth. The levels of photoresist situated under the last level of metallization play the role of sacrificial layers and allow the formation of suspended metallic structures.

REFERENCES:
patent: 3974468 (1976-08-01), Ygfors
patent: 4063203 (1977-12-01), Fujiwara et al.
patent: 4899439 (1990-02-01), Potter et al.
patent: 4909909 (1990-03-01), Florjancic
patent: 4915983 (1990-04-01), Lake et al.
patent: 4920639 (1990-05-01), Yee
patent: 5092032 (1992-03-01), Murakami

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