Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-01-30
2007-01-30
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S067000
Reexamination Certificate
active
10898677
ABSTRACT:
Reduction Talbot interference imaging is carried out using a glass or fused silica prism, where at least two surfaces within the prism allow for an increase in the propagating ray angles at the image plane compared to the object (the photomask) plane. Furthermore, by adding a second orthogonal pair of surfaces, X and Y order recombination is made possible thus allowing for the imaging in an orthogonal direction with a two-order interference scheme as well as repeating checkerboard (island and hole) patterns with a four-order interference scheme. A benefit of the invention is the reduced requirements of the photo mask, allowing for diffraction limited imaging with UV wavelengths in a media with index of unity (air) or larger (an immersion fluid). The prism interferometer is known as a Smith-Talbot prism lens.
REFERENCES:
patent: 5359388 (1994-10-01), Hollman
patent: 6094305 (2000-07-01), Shiraishi
patent: 6118516 (2000-09-01), Irie et al.
patent: 6304318 (2001-10-01), Matsumoto
patent: 6411367 (2002-06-01), Baker et al.
patent: 6627356 (2003-09-01), Kawamura et al.
patent: 6870668 (2005-03-01), Ozawa
FitzGerald Esq. Thomas R.
Hiscock & Barclay LLP
Nguyen Henry Hung
LandOfFree
Reduction Smith-Talbot interferometer prism for micropatterning does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Reduction Smith-Talbot interferometer prism for micropatterning, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reduction Smith-Talbot interferometer prism for micropatterning will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3725787