Reduction of stress during template separation

Details Reduction of stress during template separation Reduction of stress during template separation

2009-10-19

2011-12-13

Ewald, Maria Veronica (Department: 1744)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C425S4360RM, C264S293000

Reexamination Certificate

active

08075299

ABSTRACT:
Separation of an imprint lithography template and a patterned layer in an imprint lithography process may result in stress to features of the template and/or features of the patterned layer. Such stress may be reduced by minimizing open areas on the template, including dummy features within the open areas, and/or selective positioning of features on the template.

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