Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1994-11-29
1997-04-08
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 67, G03B 2772, G03F 720
Patent
active
056193041
ABSTRACT:
Rays of light from a super-high pressure mercury lamp are collected by an oval mirror, reflected by a cold mirror and additionally rendered parallel. The parallel light is passed through an interference filter and enters as incident light to individual lens units of a fly-eye lens. The individual lens units improve uniformity of intensity distribution and coherency of the light and act as isolated light sources. Right after the fly-eye lens is placed an aperture member that determines the form of an effective light source. The light passes through the aperture member, a cold mirror and a condenser lens to illuminate a reticle. A pattern of the reticle is projected on a semiconductor substrate coated with a photosensitive resin, by a projection lens system. The resolution property and exposure intensity of a reduction exposure apparatus is improved and aperture member positioning is facilitated. The throughput of the system can also be improved.
REFERENCES:
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 5335044 (1994-08-01), Shiraishi
patent: 5387961 (1995-02-01), Kang
patent: 5436761 (1995-07-01), Kamon
Grimley Arthur T.
Kerner Herbert V.
NEC Corporation
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