Metal treatment – Compositions – Heat treating
Patent
1978-12-22
1980-12-23
Rutledge, L. Dewayne
Metal treatment
Compositions
Heat treating
148187, 357 29, 357 91, H01L 21263, H01L 2126
Patent
active
042408440
ABSTRACT:
The switching time of certain semiconductor devices is decreased while maintaining other electrical characteristics of the devices by irradiating them with a neutron radiation source of greater than 1.0 Mev. to a dosage between 1.times.10.sup.11 and 1.times.10.sup.15 neutrons per square centimeter. The irradiation is preferably to a dosage between 1.times.10.sup.1 and 1.times.10.sup.14 neutrons per square centimeter and preferably has substantial energy greater than 14 Mev. The devices are also annealed during and/or subsequent to the irradiation at a temperature higher than the highest specified temperature and preferably at least 50.degree. C. higher than the highest specified temperature.
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Bartko John
Chu Chang K.
Felice Patrick E.
Tarneja Krishan S.
Menzemer C. L.
Roy Upendra
Rutledge L. Dewayne
Westinghouse Electric Corp.
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