Reducing adherence in a MEMS device

Details Reducing adherence in a MEMS device Reducing adherence in a MEMS device

2011-06-14

2011-06-14

Culbert, Roberts (Department: 1716)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224100, C359S850000

Reexamination Certificate

active

07961376

ABSTRACT:
In one embodiment, an apparatus for reducing adherence in a micro-electromechanical system (MEMS) device comprises a substrate. A MEMS is disposed outwardly from the substrate. The MEMS comprises structures and corresponding landing pads. Dibs are disposed outwardly from the substrate. Each dib has a surface with depressions. An adherence-reducing material is disposed within each depression. The adherence-reducing material reduces adherence between at least a portion of a structure and a corresponding landing pad.

REFERENCES:
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patent: 6746886 (2004-06-01), Duncan et al.
patent: 6943950 (2005-09-01), Lee et al.
patent: 7184201 (2007-02-01), Duncan
patent: 2006/0024880 (2006-02-01), Chui et al.
patent: 2006/0113618 (2006-06-01), Reboa

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