Reduced striae extreme ultraviolet elements

Details Reduced striae extreme ultraviolet elements Reduced striae extreme ultraviolet elements

2006-05-30

2006-05-30

Brunsman, David (Department: 1755)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C378S034000, C250S492200, C359S838000, C501S055000

Reexamination Certificate

active

07053017

ABSTRACT:
Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

REFERENCES:
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patent: 5154744 (1992-10-01), Blackwell et al.
patent: 2002/0043080 (2002-04-01), Best et al.
patent: 0901989 (1999-03-01), None
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patent: WO97/10487 (1997-03-01), None
patent: WO 00/17115 (2000-03-01), None
patent: WO 01/07967 (2001-02-01), None
patent: WO 01/08163 (2001-02-01), None
Fenn et al, “Characterization and Characteristics of a ULE® Glass Tailored for the EUVL Needs”, SPIE Conference, Mar. 9 2002.
U.S. Appl. No. 10/085,838, filed Feb. 27, 2002, Bowden et al.

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