Reduced striae extreme ultra violet elements

Details Reduced striae extreme ultra violet elements Reduced striae extreme ultra violet elements

2007-07-20

2008-11-25

Brunsman, David M. (Department: 1793)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S055000, C378S034000, C250S492200, C359S838000

Reissue Patent

active

RE040586

ABSTRACT:
Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

REFERENCES:
patent: 4668086 (1987-05-01), Redner
patent: 5154744 (1992-10-01), Blackwell et al.
patent: 2002/0043080 (2002-04-01), Best et al.
patent: 0901989 (1999-03-01), None
patent: 1033350 (2000-09-01), None
patent: WO 97/10487 (1997-03-01), None
patent: WO 00/17115 (2000-03-01), None
patent: WO 01/07967 (2001-02-01), None
patent: WO 01/08163 (2001-02-01), None
Hrdina et al., “Characterization and Characteristics of a ULE® Glass Tailored for the EUVL Needs,” SPIE Conference, (Mar. 9, 2002.)
U.S. Appl. No. 10/085,838, filed (Feb. 27, 2002), Bowden et al.

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