Reduced projection type step- and repeat-exposure apparatus

Details Reduced projection type step- and repeat-exposure apparatus Reduced projection type step- and repeat-exposure apparatus

1987-12-08

1989-07-04

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

048455300

ABSTRACT:
In a reduced projection type step- and repeat-exposure apparatus of the present invention, the angle of inclination of an exposure area on the wafer is first detected, and then corrected on the basis of the detected value. This measurement corrects the inclination of the exposure area. Hence, high precision patterning can be realized, even if an optical system having a small focus margin is used.

REFERENCES:
patent: 4585337 (1986-04-01), Phillips
patent: 4704020 (1987-11-01), Murakami et al.

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