Reduced-pressure drying apparatus

Details Reduced-pressure drying apparatus Reduced-pressure drying apparatus

2006-07-19

2009-02-24

Gravini, S. (Department: 3743)

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

Reexamination Certificate

active

07493705

ABSTRACT:
A reduced-pressure drying apparatus for drying a solvent in a liquid under a reduced pressure by evaporation of the solvent, includes a chamber including a first chamber and a second chamber, the first chamber accommodating work to which a liquid containing a film forming material is applied, the second chamber being coupled to the first chamber through a communicating part; a depressurizing unit depressurizing at least the second chamber; a communicating valve opening and closing the communicating part; and a control unit controlling a reduced pressure state at least of the second chamber by driving the depressurizing unit, the control unit also controlling an opening and closing state of the communicating part by driving the communicating valve.

REFERENCES:
patent: 6394110 (2002-05-01), Kamikawa et al.
patent: 63-222433 (1988-09-01), None
patent: 2000-100890 (2000-04-01), None
patent: 2000-182932 (2000-06-01), None
patent: 2001-319852 (2001-11-01), None
patent: 2002-313709 (2002-10-01), None
patent: 2003-168643 (2003-06-01), None

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