Reduced particle contamination manufacturing and packaging...

Details Reduced particle contamination manufacturing and packaging... Reduced particle contamination manufacturing and packaging...

2008-05-06

2008-05-06

Markoff, Alexander (Department: 1792)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S001000, C134S001100, C134S019000, C134S026000, C134S034000, C134S039000, C134S042000

Reexamination Certificate

active

10818311

ABSTRACT:
A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within an absorbent material.

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