Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate
2006-11-14
2006-11-14
Hess, Douglas A. (Department: 3651)
Material or article handling
Device for emptying portable receptacle
Nongravity type
C414S422000, C414S938000, C414S941000, C414S811000
Reexamination Certificate
active
07134827
ABSTRACT:
The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
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International Search Report for PCT/US02/35998 mailed Oct. 10, 2003.
Larson Robert E.
Maciej Todd K.
Matthys Quirin W.
Simondet Sean D.
Zimmerman David C.
FSI International Inc.
Hess Douglas A.
Kagan Binder PLLC
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