Reduced footprint tool for automated processing of...

Material or article handling – Device for emptying portable receptacle – Nongravity type

Reexamination Certificate

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Details

C414S422000, C414S938000, C414S941000, C414S811000

Reexamination Certificate

active

07134827

ABSTRACT:
The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.

REFERENCES:
patent: 4568234 (1986-02-01), Lee et al.
patent: 5064337 (1991-11-01), Asakawa et al.
patent: 5217501 (1993-06-01), Fuse et al.
patent: 5376212 (1994-12-01), Saiki
patent: 5378145 (1995-01-01), Ono et al.
patent: 5435683 (1995-07-01), Oosawa et al.
patent: 5468112 (1995-11-01), Ishii et al.
patent: 5544421 (1996-08-01), Thompson et al.
patent: 5620295 (1997-04-01), Nishi
patent: 6071059 (2000-06-01), Mages et al.
patent: 6203268 (2001-03-01), Miyashita
patent: 6235634 (2001-05-01), White et al.
patent: 6290405 (2001-09-01), Ueda
patent: 6313903 (2001-11-01), Ogata
patent: 6318944 (2001-11-01), Shimeno et al.
patent: 6344126 (2002-02-01), Moore
patent: 6365033 (2002-04-01), Graham et al.
patent: 6376261 (2002-04-01), Campbell
patent: 6413356 (2002-07-01), Chokshi et al.
patent: 6444481 (2002-09-01), Pasadyn et al.
patent: 6572320 (2003-06-01), Davis
patent: 6663332 (2003-12-01), Sluijk et al.
patent: 6705828 (2004-03-01), Soraoka et al.
patent: 6755603 (2004-06-01), Yamahata
patent: 2003/0091410 (2003-05-01), Larson et al.
patent: 0308275 (1989-03-01), None
patent: 63303060 (1988-12-01), None
patent: WO 98/02910 (1998-01-01), None
patent: WO 99/02436 (1999-01-01), None
patent: WO 99/62107 (1999-12-01), None
patent: WO 00/02675 (2000-01-01), None
patent: WO 03/043060 (2003-05-01), None
International Search Report for PCT/US02/35998 mailed Oct. 10, 2003.

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