Material or article handling – Apparatus for charging a load holding or supporting element... – Transporting means is a horizontally rotated arm
Reexamination Certificate
2005-12-27
2005-12-27
Dillon, Jr., Joe (Department: 3651)
Material or article handling
Apparatus for charging a load holding or supporting element...
Transporting means is a horizontally rotated arm
C414S939000, C414S222010
Reexamination Certificate
active
06979165
ABSTRACT:
The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
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Larson Robert E.
Maciej Todd K.
Matthys Quirin W.
Simondet Sean D.
Zimmerman David C.
Dillon, Jr. Joe
FSI International Inc.
Kagan Binder PLLC
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