Reduced diameter retractable cylindrical mirror analyzer

Details Reduced diameter retractable cylindrical mirror analyzer Reduced diameter retractable cylindrical mirror analyzer

1995-07-11

1996-07-30

Berman, Jack I.

Radiant energy

Electron energy analysis

H01J 4948

Patent

active

055414109

ABSTRACT:
A single pass cylindrical mirror analyzer for use in charged particle analysis has reduced size for mounting on a simple manipulator. The reduced size of the analyzer allows for placement of the analyzer on a linear motion feedtrough mounted on a conflat flange for insertion into and retraction from the analysis position. The reduced size of the cylindrical mirror analyzer in combination with good instrument resolution results in a versatile charged particle analyzer.

REFERENCES:
patent: 4048498 (1977-09-01), Gerlach et al.
patent: 4205226 (1980-05-01), Gerlach
patent: 5099117 (1992-03-01), Frohn et al.

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