Reduced blooming device having enhanced quantum efficiency

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357 30, 357 23, H01L 2714

Patent

active

042284465

ABSTRACT:
An imaging device such as silicon vidicon has a wafer of single crystal semiconductor material having an input sensing region and a charge storage region. A potential barrier is included for controlling the blooming within the sensing region, and a passivation layer is provided for stabilizing the blooming characteristics. A coating, preferably zirconium oxide, is deposited on the passivation layer to combine with the passivation layer to form an anti-reflection region for enhancing the quantum efficiency of the device. The anti-reflection region has an optical thickness substantially equal to an odd multiple of a quarter of a wavelength of light incident on the device.

REFERENCES:
patent: 3548233 (1970-12-01), Cave
patent: 3755015 (1973-08-01), Redington
patent: 3786294 (1974-01-01), Wilson
patent: 3792197 (1974-02-01), Chai
patent: 3904453 (1975-09-01), Revesz

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