Reduce 1/f noise in NPN transistors without degrading the...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means

Reexamination Certificate

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C257S525000, C257S588000

Reexamination Certificate

active

06856000

ABSTRACT:
An interfacial oxide layer (185) is formed in the emitter regions of the NPN transistor (280, 220) and the PNP transistor (290, 200). Fluorine is selectively introduced into the polysilicon emitter region of the NPN transistor (220) to reduce the 1/f noise in the NPN transistor.

REFERENCES:
patent: 5137839 (1992-08-01), Niitsu
patent: 5552626 (1996-09-01), Morikawa
N. Siabi-Shahrivar, et al., “Modeling and Characterization of Noise of Polysilicon Emitter Bipolar Transistors,”IEEE 1990 Bipolar Circuits and Technology Meeting 10.2, pp. 236-238.

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