Redox reagent-containing post-etch residue cleaning composition

Details Redox reagent-containing post-etch residue cleaning composition Redox reagent-containing post-etch residue cleaning composition

1995-07-07

1997-03-18

Tierney, Michael

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

510175, 510490, 510500, 510493, 430331, 430256, 430258, C11D 732, C11D 726, C11D 734, C11D 750

Patent

active

056123043

ABSTRACT:
A noncorrosive post-etch residue cleaning composition containing:

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