Recycling apparatus for an excimer laser

Details Recycling apparatus for an excimer laser Recycling apparatus for an excimer laser

1985-05-22

1988-02-02

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 57, 372 60, H01S 322

Patent

active

047232544

ABSTRACT:
For an excimer laser system utilizing in a laser chamber a lasing material and a mixture of a diluent rare gas and a heavy rare gas and halogen rare gas in given percentages, there is disclosed a method and apparatus for reducing the expenditure of the rare gases by continuously evacuating the laser mixture from the laser chamber removing from the evacuated laser mixture any gaseous impurities to provide a cleaned laser mixture and thereafter feeding the cleaned laser mixture back into the laser chamber. Along with the cleaned laser mixture there is fed in a supplemental halogen gas. The gaseous impurities along with the halogen are removed by passing the gas through an elongated tube having calcium particles therein with a void fraction for a given length of tube in the range 0.30 to 0.60. Some of the ratio is obtained by providing alternate layers of calcium particles and inert, refractory spacers, such as stainless steel wool.

REFERENCES:
patent: 4196400 (1980-04-01), Martin
Johnson et al.; "A Closed-cycle Gas Recirculating System for Rare-gas Halide Lasers"; Appl. Phys. Lett. 32(5), Mar. 1, 1978, p. 291

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