Recycle process for regeneration of ammoniacal copper etchant

Details Recycle process for regeneration of ammoniacal copper etchant Recycle process for regeneration of ammoniacal copper etchant

1995-05-23

1996-09-17

Powell, William

Etching a substrate: processes

Nongaseous phase etching of substrate

Recycling, regenerating, or rejunevating etchant

216 86, 216105, B44C 122, C23F 100

Patent

active

055565530

ABSTRACT:
A process for control of recycle of ammoniacal copper etchant which uses metallic aluminum to remove copper without substantially adding undesirable byproducts, by controlling the temperature and mixture rate of the removal process. The very rapid reaction can be controlled by using a diluent of copper-free etchant, heating to process temperature, then adding spent, copper containing etchant at a controlled rate while actively cooling the system to control the temperature. The copper concentration can be monitored by colorimetry while maintaining the pH above pH 8. The separated metallic copper and aluminum hydroxide sludge are easily filtered from the etchant. The purified etchant is now suitable for chemical adjustment and reuse.

REFERENCES:
patent: 4915776 (1990-04-01), Lee

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