Recovery of perfluorinated compounds from the exhaust of semicon

Refrigeration – Cryogenic treatment of gas or gas mixture – Separation of gas mixture

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95 48, F25J 300, B01D 5322

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active

060324848

ABSTRACT:
A method for the separation and recovery of fluorochemicals from a gas stream containing a diluent gas and fluorochemicals by first contacting the gas stream with a membrane system in one or more stages where the membrane(s) is selectively more permeable to the diluent gas than the fluorochemicals to result in a permeate stream rich in diluent gas and retentate rich in fluorochemicals, thereafter subjecting retentate the gas stream to a purification by distillation or adsorption resulting in a product stream enriched in fluorochemicals and a purified diluent stream. The purified diluent stream is used as a purge stream and/or a recycle stream together with the permeate stream to a vacuum pump upstream of the membrane separation step.
A product stream can be produced from a similar gas stream containing diluent gas and fluorochemical by an adsorption step combined with a subsequent distillation step where the purified diluent from the adsorption step is used as a purge stream and/or wholly or partial combined with a purified diluent stream from the distillation step as a recycle stream introduced into the process upstream of the adsorption step.
Enriched fluorochemical and an enriched diluent streams can be produced from a stream containing diluent gas and fluorochemicals by cryogenic distillation with the enriched diluent stream recycled to the process upstream of the distillation step.

REFERENCES:
patent: Re33678 (1991-09-01), Campbell et al.
patent: 4119417 (1978-10-01), Heki et al.
patent: 4180388 (1979-12-01), Graham et al.
patent: 4435191 (1984-03-01), Graham
patent: 4597777 (1986-07-01), Graham
patent: 4599096 (1986-07-01), Burr
patent: 4654063 (1987-03-01), Auvil et al.
patent: 4701187 (1987-10-01), Choe et al.
patent: 4781907 (1988-11-01), McNeill
patent: 4787919 (1988-11-01), Campbell et al.
patent: 4894068 (1990-01-01), Rice
patent: 4964886 (1990-10-01), Brugerolle et al.
patent: 5051114 (1991-09-01), Nemser et al.
patent: 5064446 (1991-11-01), Kusuki et al.
patent: 5240471 (1993-08-01), Barbe et al.
patent: 5252219 (1993-10-01), Xu
patent: 5282969 (1994-02-01), Xu
patent: 5378263 (1995-01-01), Prasad
patent: 5417742 (1995-05-01), Tamhankar et al.
patent: 5455016 (1995-10-01), Choe et al.
patent: 5482539 (1996-01-01), Callahan
patent: 5502969 (1996-04-01), Jin et al.
patent: 5730779 (1998-03-01), Chernyakov et al.
Glenn M. Tom, et al., "PFC Concentration and Recycle" Mat. Res. Soc. Symp. Proc. vol. 344, 1994 pp. 267-271.
Denis Ruffin presentation at semiconductor PFC workshop in Austin Texas, Feb. 7, 1996.
Air Products and Chemicals, Inc. and Radian International L.L.C., PFC Recovery Systems for the Electronics Industry, 1996, Publication No. 325-95410.
Rautenbach, et al., Gas Permeation-Module Design and Arrangement, Chem. Eng. Process, 21 (1987) pp. 141-150.
"PFC Capture Alpha Systems Testing Update", Ruffin, et al., PFC Technical Update SEMI 1996.
"PFC Capture Alpha Systems Testing Update", Cummins, et al., SEMI 1996.

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