Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1983-04-12
1985-04-23
Saba, William G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
29576G, 29576T, 29580, 148DIG54, 148DIG135, 148DIG148, 156610, 156612, 156DIG83, 156DIG88, 156DIG98, H01L 21205, H01L 21461
Patent
active
045128251
ABSTRACT:
A method of recovering intact at room temperature a layer of a first material, such as silicon carbide, produced by depositing it from the gas phase at a deposition temperature above room temperature on a substrate of a second material, such as silicon, having a different coefficient of thermal expansion than that of the first material. The substrate is separated from the layer prior to cooling, and then the separated layer is cooled to room temperature free of stresses otherwise present as a result of the different thermal expansions of the substrate and layer.
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Addamiano Arrigo
Klein Philipp H.
Beers Robert F.
Ellis William T.
Klein Alan P.
Saba William G.
The United States of America as represented by the Secretary of
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