Recovery device for polishing agent and deionizing water for a p

Details Recovery device for polishing agent and deionizing water for a p Recovery device for polishing agent and deionizing water for a p

1997-08-07

1999-04-20

Rose, Robert A.

Abrading

Abrading process

Abradant supplying

451 41, 451 36, 451446, B24B 5700

Patent

active

058953159

ABSTRACT:
A recovery device for a polishing agent and deionizing water for a polishing machine is disclosed. Especially, a recovery device fitted to a drain conduit of a waste polishing agent produced from a chemical-mechanical polishing (CMP) machine to recover the used polishing agent and/or the deionizing water used in the procedure of polishing. The recovery device comprises essentially an electromagnetic valve controlled by a control electronic unit which receives the signals from the chemical mechanical polishing (CMP) machine.

REFERENCES:
patent: 5538462 (1996-07-01), Gnadt
patent: 5755614 (1998-05-01), Adams et al.
patent: 5775980 (1998-07-01), Sasaki et al.
patent: 5791970 (1998-08-01), Yueh
patent: 5799643 (1998-09-01), Miyata et al.
patent: 5800251 (1998-09-01), Nakazato et al.

Affiliated with

Also associated with

Rating

Recovery device for polishing agent and deionizing water for a p does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Recovery device for polishing agent and deionizing water for a p, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Recovery device for polishing agent and deionizing water for a p will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2244537