Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-04-26
2011-04-26
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07932997
ABSTRACT:
A method for illuminating an object for selectively patterning a photosensitive material overlying the object using an array of mirror devices. The method includes applying electromagnetic radiation using a flood beam onto an array of mirror devices. Each of the mirror devices is associated with a pixel for a pattern to be exposed onto the photosensitive material. The method also includes selectively actuating one or more mirrors on the array to deflect corresponding portions of the beam onto corresponding portions of the photosensitive material to expose the portions of the photosensitive material on the object. The method maintains one or more other mirrors in a selected position(s) to maintain corresponding other portions of the photosensitive material free from exposure. Preferably, the combination of exposed and unexposed portions forms the pattern exposed onto the photosensitive material.
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Kilpatrick Townsend and Stockton LLP
Nguyen Hung Henry
Semiconductor Manufacturing International (Shanghai) Corporation
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