Recirculating chemical bath with inflow and self balancing outfl

Details Recirculating chemical bath with inflow and self balancing outfl Recirculating chemical bath with inflow and self balancing outfl

1990-12-26

1991-10-08

Chambers, A. Michael

Fluid handling

Systems

Closed circulating system

137565, 137574, 137593, 118429, E03B 707

Patent

active

050545191

ABSTRACT:
A chemical bath in which batches of integrated circuit wafers or other articles are immersed in hot liquid chemical during manufacture has a processing vessel, an adjacent sump vessel and a trough which carries overflow from the processing vessel to the sump vessel. A pump continuously recirculates liquid from the sump vessel to the processing vessel through a filter. A continuous inflow of liquid is received from a liquid chemical source and an intermittent outflow occurs through an outlet at an upper region of the sump vessel. The liquid chemical source may, for example, supply make-up fluid or be a reprocessor that repurifies the outflow from the sump vessel. The storage capacity of the sump vessel below the outlet is greater than that needed to contain the volume of liquid that is displaced in the processing vessel by the batch of wafers. This avoids pump starvation when liquid level is lowered in the processing vessel by removal of a batch of wafers and also assures that outflow matches inflow from the liquid chemical source over a period of time without requiring flow sensing devices, dynamic valving or other complications.

REFERENCES:
patent: 1457121 (1923-05-01), Mudge
patent: 2860785 (1958-11-01), Gardner
patent: 3033712 (1962-05-01), Brevick
patent: 3851662 (1974-12-01), Jessop
patent: 3987816 (1976-10-01), Lange
patent: 4090530 (1978-05-01), Lange
patent: 4506986 (1985-03-01), Freeman
patent: 4650339 (1987-03-01), Chetcuti et al.
patent: 4804990 (1989-02-01), Jessop

Affiliated with

Also associated with

Rating

Recirculating chemical bath with inflow and self balancing outfl does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Recirculating chemical bath with inflow and self balancing outfl, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Recirculating chemical bath with inflow and self balancing outfl will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-251486