Radiant energy – Irradiation of objects or material
Reexamination Certificate
2006-11-14
2006-11-14
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492210, C414S805000
Reexamination Certificate
active
07135691
ABSTRACT:
A reciprocating drive system and apparatus for scanning a workpiece through an ion beam are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to the ion beam. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.
REFERENCES:
patent: 4736107 (1988-04-01), Myron
patent: 5486080 (1996-01-01), Sieradzki
patent: 5737500 (1998-04-01), Seraji et al.
patent: 5741113 (1998-04-01), Bacchi et al.
patent: 5746565 (1998-05-01), Tepolt
patent: 6384418 (2002-05-01), Fujii et al.
patent: 6428266 (2002-08-01), Solomon et al.
patent: 6429442 (2002-08-01), Tomita et al.
patent: 6515288 (2003-02-01), Ryding et al.
patent: 6580083 (2003-06-01), Berrian
patent: 6777687 (2004-08-01), Vanderpot et al.
patent: 6953942 (2005-10-01), Graf et al.
patent: 7074246 (2006-07-01), Berner et al.
patent: 2001/0032937 (2001-10-01), Berrian
patent: 2003/0068215 (2003-04-01), Mori et al.
patent: 2003/0123958 (2003-07-01), Sieradzki et al.
patent: 2003/0192474 (2003-10-01), Smick et al.
patent: 2004/0058513 (2004-03-01), Murrell et al.
patent: 2004/0191931 (2004-09-01), Murrell et al.
patent: 2005/0184253 (2005-08-01), Ioannou et al.
patent: 1 047 101 (2000-10-01), None
patent: 1 056 114 (2000-11-01), None
patent: 11 007 915 (1999-01-01), None
patent: WO 00/05744 (2000-02-01), None
patent: WO 2004/001789 (2003-12-01), None
International Search Report, Int'l Application No. PCT/US2005/011497, Int'l Filing Date May 4, 2005, 2 pgs.
International Search Report, Int'l Application No. PCT/US2005/011581, Int'l Filing Date May 4, 2005, 2 pgs.
Berrian Donald W.
Pollock John D.
Vanderpot John W.
Axcelis Technologies Inc.
Eschweiler & Associates LLC
Hashmi Zia R.
Wells Nikita
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