Recessed electrode for electrostatically actuated structures

Details Recessed electrode for electrostatically actuated structures Recessed electrode for electrostatically actuated structures

2006-06-20

2006-06-20

Donovan, Lincoln (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07064637

ABSTRACT:
An electro-statically actuated switch having a reduced gap distance between electrodes for reducing actuation voltage is provided. The invention provides more reliable electro-statically actuated switches. The invention provides a micro-electro-mechanical system (MEMS) that includes a recessed, movable electrode. The invention provides electro-statically actuated switches that reduce the likelihood of stiction and beam deformation and that allows lower actuation voltage for electrostatically actuated structures such as switches and mirrors. A method for fabricating such a design is provided that allows lower actuation voltage.

REFERENCES:
patent: 5578976 (1996-11-01), Yao
patent: 6054659 (2000-04-01), Lee et al.
patent: 6310339 (2001-10-01), Hsu et al.
patent: 6396368 (2002-05-01), Chow et al.
patent: 6746891 (2004-06-01), Cunningham et al.
patent: 6768403 (2004-07-01), Hsu et al.

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