Receiving container body for object to be processed

Details Receiving container body for object to be processed Receiving container body for object to be processed

2006-07-11

2006-07-11

Bui, Luan K. (Department: 3728)

Material or article handling

Apparatus for moving material between zones having different...

C206S454000, C206S711000, C414S940000

Reexamination Certificate

active

07073999

ABSTRACT:
The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a plurality of second objects to be processed, the second objects to be processed being larger than the first objects to be processed; a supporting part provided at an inside wall surface of the box case, the supporting part being capable of supporting the second objects to be processed in a tier-like manner; an open-close lid provided at an opening part of the box case in a removable and attachable manner; and a positioning-engaging part provided at a bottom part of the box case in a removable and attachable manner. The open-close lid is capable of sealing the box case. The positioning-engaging part is capable of engaging with a positioning part provided at a lower surface of a bottom part of the cassette to position the cassette.

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International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP2003/06542.
200 mm Cassette Adapter for 300 mm FOUPs, MicroTool web site.
AM-3004-2 300mm-200mm Cassette Adapter, MicroTool website.

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