Rear-illuminated-type photodiode array

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure

Reexamination Certificate

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C257S465000, C257SE31022

Reexamination Certificate

active

07605406

ABSTRACT:
A rear-illuminated-type photodiode array has (a) a first-electroconductive-type semiconductor substrate, (b) a first-electroconductive-type electrode that is placed at the rear side of the semiconductor substrate and has openings arranged one- or two-dimensionally, (c) an antireflective coating provided at each of the openings of the first-electroconductive-type electrode, (d) a first-electroconductive-type absorption layer formed at the front-face side of the substrate, (e) a leakage-lightwave-absorbing layer that is provided on the absorption layer and has an absorption edge wavelength longer than that of the absorption layer, (f) a plurality of second-electroconductive-type regions that are formed so as to penetrate through the leakage-lightwave-absorbing layer from the top surface and extend into the absorption layer to a certain extent and are arranged one- or two-dimensionally at the positions coinciding with those of the antireflective coatings at the opposite side, and (g) a second-electroconductive-type electrode provided on the top surface of each of the second-electroconductive-type regions.

REFERENCES:
patent: 5189297 (1993-02-01), Ahlgren
patent: 6157404 (2000-12-01), Marshall et al.
patent: 6518638 (2003-02-01), Kuhara et al.
patent: 6521968 (2003-02-01), Kuhara et al.
patent: 2004/0038443 (2004-02-01), Jiao
patent: 2005/0194654 (2005-09-01), Iguchi
patent: 2001-144278 (2001-05-01), None
patent: 2001-352094 (2001-12-01), None

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