Real world modeling and control process for integrated manufactu

Details Real world modeling and control process for integrated manufactu Real world modeling and control process for integrated manufactu

1990-05-04

1994-04-19

Smith, Jerry

Boots, shoes, and leggings

364149, 364156, 364478, G06F 1546

Patent

active

053052218

ABSTRACT:
This process models production integrated processing equipment, also known as cluster tools, modular equipment, track systems, etc. Further, the model produced by this invention is a real-world model, i.e., it is realistic and validatable. In addition, the invention provides a process for developing machine-specific implementations for PIPEs performing such complex processes as plasma etching, plasma deposition, chemical-vapor deposition, physical-vapor deposition, photolithography, photo-resist processing, rapid thermal processing, and oxidation, as well as other processes. The PIPE-specific model can be used for performance analysis. The effect of changes in process times, process recipes, and process mixtures on cycle time, throughput, resource utilization, and bottlenecks can be analyzed. These PIPE models may be used in the design or redesign of PIPEs. Further, the PIPE-specific model can be used to control material movement in the PIPE, including buffer dynamics to avoid machine lock-up. The PIPE-specific models may be used as part of computer-integrated manufacturing systems that control factories. The real-world modeling and control of these complex PIPE systems has become necessary with the recent introduction of such integrated equipment.

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E. A. Elsayed and T. O. Boucher, Analysis and Control of Production Systems, Prentice-Hall, Englewood Cliffs, N.J., 1985, pp. 4-5 and 226-227.

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