Real time target topography tracking during laser processing

Details Real time target topography tracking during laser processing Real time target topography tracking during laser processing

2005-10-18

2009-12-29

Paik, Sang Y (Department: 3742)

Electric heating

Metal heating

By arc

C219S121780

Reexamination Certificate

active

07638731

ABSTRACT:
An efficient method of and a system for performing topography measurement facilitates increasing laser machining throughput. Topography measurements at multiple points on a target specimen or continuous real time measurement and monitoring of the target specimen surface topography and target specimen thickness can be performed during a laser machining process. Measurement of the thickness of the target specimen to be laser machined would permit fine tuning of laser energy delivered and result in higher quality target material removal.

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