Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
Patent
1996-06-24
1999-04-06
Kemper, Melanie A.
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Chemical analysis
36952801, 216 60, G01N 2190
Patent
active
058930469
ABSTRACT:
A method and apparatus provide for monitoring and controlling a chemical process with a chemical substance adapted for treatment of a semiconductor device. The chemical substance is held in a container. The process of monitoring is provided by transmitting a light or other electromagnetic energy from a source located within the container through the chemical substance. The electromagnetic energy transmitted through the chemical substance is sensed with a photosensor or a photosensor fiber located within the container. A comparison to a standard is made of the result of the sensing by spectrum analysis, with a passband filter between the source and the photosensor. The sensor may comprise a wavelength adjustable photosensor or a multiple wavelength photosensor.
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Lu Shou I.
Wu Benjamin
Ackerman Stephen B.
Jones II Graham S.
Kemper Melanie A.
Saile George O.
Taiwan Seimconductor Manufacturing Company, Ltd.
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