Real time imprint process diagnostics for defects

Details Real time imprint process diagnostics for defects Real time imprint process diagnostics for defects

2009-02-25

2010-10-19

Nguyen, Khanh (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

With measuring, testing, or inspecting

C264S299000, C264S319000, C264S284000, C264S293000, C256S013000, C256S013000, C256S013000, C256S013000, C425S385000

Reexamination Certificate

active

07815824

ABSTRACT:
Defects and/or particles during an imprint lithography process may provide exclusion zones and/or transition zones in the patterned layer. Exclusion zones and/or transition zones in the patterned layer may be identified to provide a region of interest on a template.

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