Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
Reexamination Certificate
2007-01-02
2007-01-02
Assouad, Patrick J. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Chemical analysis
C700S120000, C700S121000, C438S005000, C438S007000, C438S014000, C438S016000
Reexamination Certificate
active
10978604
ABSTRACT:
Systems and/or methods are disclosed for measuring and/or controlling an amount of impurity that is dissolved within an immersion medium employed with immersion lithography. The impurity can be photoresist from a photoresist layer coated upon a substrate surface. A known grating structure is built upon the substrate. A real time immersion medium monitoring component facilitates measuring and/or controlling the amount of impurities dissolved within the immersion medium by utilizing light scattered from the known grating structure.
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Dakshina-Murthy Srikanteswara
Emami Iraj
Phan Khoi A.
Rangarajan Bharath
Singh Bhanwar
Advanced Micro Devices , Inc.
Amin Turocy & Calvin LLP
Assouad Patrick J.
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