Real time image resizing for dynamic digital photolithography

Details Real time image resizing for dynamic digital photolithography Real time image resizing for dynamic digital photolithography

2006-02-28

2006-02-28

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C345S660000, C359S292000

Reexamination Certificate

active

07006196

ABSTRACT:
A dynamic photolithography system resizes a pattern in real time and photolithographically transfers an image of the resized pattern onto a surface to compensate for distortions in the surface and/or optics. The system uses two or more pre-stored spatially offset renderings of the pattern. Each spatially offset rendering includes pixel data identifying light modulation elements within a spatial light modulator representing the pattern. The pattern is spatially offset between the renderings. Portions of the two or more spatially offset renderings are selected as a function of the distortion to resize the pattern and photolithographically transfer the image of the resized pattern onto the surface.

REFERENCES:
patent: 6005988 (1999-12-01), Schroeder
patent: 2003/0099026 (2003-05-01), Sandstrom
patent: 2004/0032419 (2004-02-01), Zhou et al.

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