Real-time fault detection and classification system in use...

Details Real-time fault detection and classification system in use... Real-time fault detection and classification system in use...

2007-05-17

2009-12-29

Von Buhr, M. N. (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C702S185000, C700S121000

Reexamination Certificate

active

07640070

ABSTRACT:
A real-time fault detection and classification (FDC) system, which is in use with a semiconductor fabrication process having a first sub-fabrication process and a second sub-fabrication process, includes a computer integrated manufacturing (CIM) host adopting a SEMI equipment communication standard (SECS), a semiconductor tool for executing the first sub-fabrication process and generating first status data in conformity with the SECS, a non-semiconductor tool for executing the second sub-fabrication process and generating second status data in conformity with a predetermined connectivity standard different from the SECS, and a tool simulator connecting the tool simulator with the semiconductor tool and the non-semiconductor tool for receiving the first and second status data and transforming the second status data into third status data in conformity with the SECS such that the CIM host can classify the first and third status data according to a predetermined classification technique and get a control over equipment health conditions of the semiconductor tool as well as the non-semiconductor tool.

REFERENCES:
patent: 5657252 (1997-08-01), George
patent: 6836691 (2004-12-01), Stirton
patent: 7082345 (2006-07-01), Shanmugasundram et al.
patent: 7146237 (2006-12-01), Lev-Ami et al.
patent: 7151976 (2006-12-01), Lin
patent: 7162394 (2007-01-01), Cheng et al.
patent: 7171897 (2007-02-01), Barajas et al.
patent: 7174230 (2007-02-01), Arackaparambil et al.
patent: 7404207 (2008-07-01), Perry
patent: 7467018 (2008-12-01), Callaghan
patent: 2004/0054642 (2004-03-01), Chen
patent: 2005/0010311 (2005-01-01), Barbazette et al.
patent: 2005/0216579 (2005-09-01), Yang et al.
patent: 2006/0064440 (2006-03-01), Perry
patent: 2006/0095545 (2006-05-01), Dreyer et al.
patent: 2006/0106921 (2006-05-01), Sim et al.
patent: 2007/0094548 (2007-04-01), Lev-Ami et al.
patent: 2007/0142950 (2007-06-01), Okita
patent: 2007/0150235 (2007-06-01), Lev-Ami et al.
patent: 2007/0260410 (2007-11-01), Raymond
patent: 2008/0125898 (2008-05-01), Harvey et al.
patent: 10-1211168 (2008-07-01), None
patent: 2004-052880 (2004-06-01), None

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