Chemistry: analytical and immunological testing – Determination of water – By use of a karl fischer reagent
Reexamination Certificate
2007-05-08
2007-05-08
Gakh, Yelena G. (Department: 1743)
Chemistry: analytical and immunological testing
Determination of water
By use of a karl fischer reagent
C436S051000, C436S052000, C422S062000, C422S075000
Reexamination Certificate
active
10264408
ABSTRACT:
A multicomponent fluid composition monitoring and compositional control system, in which a component analysis is effected by titration or other analytical procedure, for one or more components of interest, and a computational means then is employed to determine and responsively adjust the relative amount or proportion of the one or more components in the multicomponent fluid composition, to maintain a predetermined compositional character of the multicomponent fluid composition. The system is usefully employed in semiconductor manufacturing photoresist and post-etch residue removal, in which the cleaning medium is a semi-aqueous solvent composition, and water is the monitored and responsively adjusted component.
REFERENCES:
patent: 4190481 (1980-02-01), Goffredo
patent: 4664756 (1987-05-01), Shimizu et al.
patent: 5722441 (1998-03-01), Teramoto
patent: 5746233 (1998-05-01), Kuroda et al.
patent: 5896874 (1999-04-01), Nakagawa et al.
patent: 5910269 (1999-06-01), Ono et al.
patent: 6146008 (2000-11-01), Laederich et al.
patent: 6284197 (2001-09-01), Abbott et al.
patent: 6355407 (2002-03-01), Takamuki et al.
patent: 61281532 (1986-12-01), None
patent: 4278529 (1992-10-01), None
patent: 5074755 (1993-03-01), None
patent: 07037851 (1995-02-01), None
Kohl Photoelectrochemical etching of semiconductors, IBM J. Res. Develop., 1998, v. 42, No. 5, pp. 629-637.
J. Electrochem Soc. 142 (1995) 1733.
Steigerwald, et al., J. ElectroChem Soc. 141, 2842 (1994).
Brusic, et al., J. Electrochem, Soc. 138, 2253, (1991).
Steigerwald, et al. “Chemical Mechanical Planarization of Microelectronic Materials”, Wiley, 1997.
Aycock Todd
Evans Joseph W.
Kloffenstein Thomas
Stevens Russell
Advanced Technology & Materials Inc.
Chappuis Maggie
Gakh Yelena G.
Hultquist Steven J.
Intellectual Property / Technology Law
LandOfFree
Real-time component monitoring and replenishment system for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Real-time component monitoring and replenishment system for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Real-time component monitoring and replenishment system for... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3807867