Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
Reexamination Certificate
2005-08-16
2005-08-16
Wachsman, Hal (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Measured signal processing
C702S159000, C702S172000, C356S625000
Reexamination Certificate
active
06931361
ABSTRACT:
A system for characterizing periodic structures formed on a sample on a real time basis is disclosed. A spectroscopic measurement module generates output signals as a function of wavelength. The output signals are supplied to a processor for evaluation, which creates an initial theoretical model having a rectangular structure. The processor calculates the theoretical optical response of that sample, which is compared to normalized measured values at each of a plurality of wavelengths. The model configuration is then modified to be closer to the actual measured structure. The processor recalculates the optical response and compares the result to the normalized data. This process is repeated in an iterative manner until a best fit rectangular shape is obtained. Thereafter, the complexity of the model is iteratively increased, and model is iteratively fit to the data until a best fit model is obtained which is similar to the periodic structure.
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U.S. Appl. No. 09/818,703, filed Mar. 27, 2001, entitled “Critical Dimension Analysis with Simultaneous Multiple Angle of Incidence Measurements,” by Jon Opsal et al., 26 pages of specification and 2 sheets of informal drawings.
Chu Hanyou
Opsal Jon
Stallman & Pollock LLP
Therma-Wave, Inc.
Wachsman Hal
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