Real time alignment system for a projection electron beam lithog

Details Real time alignment system for a projection electron beam lithog Real time alignment system for a projection electron beam lithog

1996-05-15

1998-02-10

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Registration or layout process other than color proofing

430296, 2504911, G03F 900

Patent

active

057167427

ABSTRACT:
A system for aligning an electron beam relative to a workpiece employs an alignment fixture immediately above the workpiece fixture through which the electron beam passes. Lateral laser alignment beams in two axes reflect off the alignment fixture to determine alignment fixture position relative to the workpiece fixture by differential interferometry. Energy alignment beams are split off from the electron beam and hit multiple diode detectors mounted on the alignment fixture. The detectors provide an output signal based on the amount of surface area hit by the energy alignment beam to determine the position of the electron beam relative to the alignment fixture. Servo controls use this real time position information to control the precise position of the electron bean relative to the workpiece by making last minute corrections to the electron beam just before it hits the workpiece.

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