Real time alarm classification and method of use

Details Real time alarm classification and method of use Real time alarm classification and method of use

2007-03-29

2009-08-04

Nguyen, Phung (Department: 2612)

Communications: electrical

Condition responsive indicating system

Specific condition

Reexamination Certificate

active

07570174

ABSTRACT:
A real time alarm classification system and method of use and, more particularly, to a residual gas analyzer configured to identify specific root causes of an abnormal condition such as, for example, contamination, undesirable process variability and equipment malfunction in wafer processing. The real-time alarm classification system comprises a computer infrastructure operable to: generate top contributors associated with an alarm triggered by sensed abnormal conditions; compare the top contributors to contributors of historic RGA (residual gas analyzer) alarms of known root causes that were generated by a validated model; and provide a probable root cause of the sensed abnormal conditions when a match is found between the top contributors and the contributors associated with the historic RGA alarms of known root causes. A method and computer readable medium is also contemplated to provide the processes.

REFERENCES:
patent: 6664119 (2003-12-01), Choi et al.
patent: 2003/0008422 (2003-01-01), Frees et al.
patent: 2008/0029484 (2008-02-01), Park et al.
patent: 2008/0083885 (2008-04-01), Wilhelmus Van Herpen et al.

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