Read only data bus and write only data bus forming in...

Static information storage and retrieval – Interconnection arrangements

Reexamination Certificate

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C365S149000

Reexamination Certificate

active

06744657

ABSTRACT:

BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor memory device for storing desired data therein and performing reading or writing of data therefrom and thereto at high speed.
Among various kinds of semiconductor memory devices, dynamic random access memory (hereinafter referred to as DRAM) has been often used as a mass storage device.
Referring to
FIGS. 1
,
12
and
13
, a DRAM of Conventional Example 1 will be explained.
FIG. 1
shows the structure of the DRAM of Conventional Example 1 in schematic form. (
FIG. 1
also applies to Embodiments.)
The DRAM will be described below with reference to FIG.
1
.
The DRAM as shown in
FIG. 1
has a memory subarray
1
, a sense amplifier subarray
2
, a peripheral circuit area
3
, a write-only data bus
4
and a read-only data bus
5
.
In the memory subarray
1
, a plurality of DRAM cells is arranged in an array. In the sense amplifier subarray
2
, a plurality of sense amplifier for detecting and amplifying a small signal of the memory subarray
1
is arranged in an array. The peripheral circuit area
3
receives or sends data from/to outside. The write-only data bus
4
transfers data from the peripheral circuit area
3
to a memory cell via the sense amplifier. The read-only data bus
5
transfers data in a memory cell amplified by the sense amplifier to the peripheral circuit area
3
.
Operations of the conventional DRAM thus constructed will be described below.
In writing data from outside into a memory cell, the data from the peripheral circuit area
3
is written into the sense amplifier subarray
2
through the write-only data bus
4
and then the data in the sense amplifier subarray
2
is written into a designated memory cell through a bit line.
In reading data to outside, data in a memory cell is amplified by the sense amplifier subarray
2
via a bit line and then the amplified data is transferred to the peripheral circuit area
3
through the read-only data bus
5
to read out.
FIG. 12
is a schematic view illustrating data buses formed on the memory subarray of the semiconductor memory device according to Conventional Example 1 (when viewed from a top surface of the semiconductor memory device). In
FIG. 12
, reference numerals
1
,
4
and
5
designate the memory subarray, the write-only data bus and the read-only data bus, respectively. The functions of these elements are mentioned above.
FIG. 13
is a schematic sectional view illustrating wiring of data buses of the semiconductor memory device according to Conventional Example 1 (a sectional view taken along the face perpendicular to each data bus line on the memory array (the face V—V of FIG.
12
)).
In the present specification (including each Conventional Example and Embodiment), RDB
1
, XRDB
1
, RDB
2
, XRDB
2
, RDB
3
and so forth are read lines, and WDB
1
, XWDB
1
, WDB
2
, XWDB
2
and so forth are write lines.
In the respective pairs of lines, RDB
1
and XRDB
1
, RDB
2
and XRDB
2
and so forth, each pair transmits complementary signals which are 1-bit of read signal.
In the respective pairs of lines, WDB
1
and XWDB
1
, WDB
2
and XWDB
2
and so forth, each pair transmits complementary signals which are 1-bit of write signal.
In
FIG. 13
, the read-only data bus and the write-only data bus are formed in a same metal layer and two lines of each pair are arranged adjacently to each other.
In
FIG. 13
, each line extends in the direction perpendicular to the sheet.
In this specification, the read line and write line in each Conventional Example and Embodiment are 1.5 &mgr;m in thickness (width) and located at minimum 1.5 &mgr;m intervals.
The write-only data bus and the read-only data bus are a 32 bits of complementary data bus and all lines are aligned within the bus width of 380 &mgr;m.
The read-only data bus has 64 (32 pairs) read lines and the write-only data bus has 64 (32 pairs) write lines.
This allows stray capacitance between lines of each Conventional Example and Embodiment to be compared in the same conditions. The bus width of 380 &mgr;m is calculated from the following equation:
1.5 &mgr;m×{(64+64)+127}≈380 &mgr;m
That is, 380 &mgr;m is the narrowest bus width within which data buses are positioned in Conventional Examples 1 and 2.
While the demand for advanced micro-fabrication technique and high-performance semiconductor memory device grows, there has been a problem that performance of semiconductor memory device cannot be improved due to delay in working speed of data bus caused by increase in interference noise (including Miller noise) between read lines or write lines. The interference noise is generated by increase in wiring capacitance as well as coupling capacitance between lines.
As a conventional example, a semiconductor memory device having the structure that a write line and a read line are positioned alternately in a same layer is disclosed in patent publication for U.S. Pat. No. 2,508,245 (hereinafter referred to as Conventional Example 2). In this structure, in consideration that read data bus and write data bus do not operate concurrently, read lines and write lines are placed alternately, thereby to decrease interference noise such as Miller noise(caused by Miller capacitance)between read lines or write lines. This can achieve the semiconductor memory device with high-speed operating data bus.
With reference to
FIGS. 1
,
14
and
15
, the DRAM of Conventional Example 2 will be described.
The semiconductor memory device of Conventional Example 2 has the same structure as that shown in FIG.
1
.
FIG. 1
has been already described above.
FIG. 14
is a schematic view illustrating data buses formed on the memory subarray of the semiconductor memory device according to Conventional Example 2 (when viewed from a top surface of the semiconductor memory device). In
FIG. 14
, reference numerals
1
,
4
and
5
designate a memory subarray, a write-only data bus and a read-only data bus, respectively. The structure of these elements was explained referring to
FIG. 1
FIG. 15
is a schematic sectional view illustrating wiring of data buses of the semiconductor memory device according to Conventional Example 2 (a sectional view taken along the face perpendicular to each line of data buses on the memory array (the face VI—VI of FIG.
14
)).
As read lines RDB and XRDB and write lines WDB and XWDB are described referring to
FIG. 13
, their explanation will be omitted.
In
FIG. 15
, the read lines and the write lines are positioned alternately in a same metal layer. As shown in
FIG. 15
, in aligning data bus lines within the bus width of 380 &mgr;m, an interval between a pair of lines (for example, RDB
1
and XRDB
1
) becomes 4.5 &mgr;m.
The stray capacitance between two lines in a pair depends on interval between the two lines except for a conductive part (width of a line intervening the two lines in a pair). Each line of data buses is in a precharged state during non-operating time. Therefore, an adjacent precharged line bus serves as a shield line between a pair of lines, thereby to eliminate any interference between the pair of lines. This can reduce interference noise such as Miller noise between read lines or write lines so that the semiconductor memory device can achieve high-speed operating data bus.
In order to operate the semiconductor memory device at higher speed, however, it is necessary to further reduce coupling capacitance and interference noise between read lines or write lines.
An objection of the present invention is to provide a semiconductor memory device that enables data buses to operate at high speed by reducing interference noise (including Miller noise) between data bus lines.
In semiconductor memories such as dual port RAM, write operation and read operation mix and a write-only data bus and a read-only data bus transmit a signal concurrently. In such semiconductor memories, interference noise between a write line and a read line also causes a problem. Another object of the present invention is to provide a semiconductor memory device such as dual port RAM wh

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