Coating apparatus – Gas or vapor deposition – With treating means
Patent
1988-01-15
1989-02-21
Bueker, Richard
Coating apparatus
Gas or vapor deposition
With treating means
118715, 118719, 422245, C23C 1600
Patent
active
048055565
ABSTRACT:
This invention relates to the manufacture of high-purity polycrystalline silicon rods by the pyrolysis of silane. More specifically, the present invention relates to an improved method for pyrolyzing monosilane to form high-quality polycrystalline rods of uniform diameter and to an improved pyrolysis reactor system for forming high-quality polycrystalline silicon rods of uniform diameter at high production rates.
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patent: 3358638 (1967-12-01), Rummel
patent: 3463119 (1969-08-01), Basche
patent: 3523816 (1970-08-01), Cave
patent: 3918396 (1975-11-01), Dietze
patent: 4147814 (1979-04-01), Yatsurugi
patent: 4715317 (1987-12-01), Ishizuka
patent: 4734297 (1988-03-01), Jacubert
Burke William D.
Hagan David W.
Thoman Thomas R.
Willmert McRea B.
Bueker Richard
Reinisch Morris N.
Union Carbide Corporation
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