Reactor having an array of heating filaments and a filament forc

Details Reactor having an array of heating filaments and a filament forc Reactor having an array of heating filaments and a filament forc

1998-11-06

1999-12-07

Breneman, Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118730, C23C 1600

Patent

active

059976500

ABSTRACT:
An apparatus for adjusting the tension on a heating filament in a reactor used in carbon deposition on a substrate via chemical-vapor deposition is disclosed, as is a method for preventing breakage of the filaments during operation. The apparatus comprises a force regulator attached to an array of heating filaments. Preferably, the force regulator is adjustable and is adjusted prior to reactor operation and/or periodically or continuously as the filaments lengthen due to carburization in the carbon-vapor environment of the reactor. The adjustable force regulator attached to an array of filaments enables effective regulation of the force on a filament during reactor operation and provides an easily-maintained reactor with quick turn-around time between cycles of use.

REFERENCES:
patent: 3659767 (1972-05-01), Martin
patent: 4953499 (1990-09-01), Anthony
patent: 4970986 (1990-11-01), Anthony

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