Reactor for producing large particles of materials from gases

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon

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Details

423350, 422150, 422158, 427 86, 118716, C01B 3302

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active

046422277

ABSTRACT:
A method and apparatus is disclosed for producing large particles of material from gas, or gases, containing the material (e.g., silicon from silane) in a free-space reactor comprised of a tube (20) and controlled furnace (25). A hot gas is introduced in the center of the reactant gas through a nozzle (23) to heat a quantity of the reactant gas, or gases, to produce a controlled concentration of seed particles (24) which are entrained in the flow of reactant gas, or gases. The temperature profile (FIG. 4) of the furnace is controlled for such a slow, controlled rate of reaction that virtually all of the material released condenses on seed particles and new particles are not nucleated in the furnace. A separate reactor comprised of a tube (33) and furnace (30) may be used to form a seed aerosol which, after passing through a cooling section (34) is introduced in the main reactor tube (34) which includes a mixer (36) to mix the seed aerosol in a controlled concentration with the reactant gas or gases.

REFERENCES:
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patent: 4013420 (1977-03-01), Cheng
patent: 4084024 (1978-04-01), Schumacher
patent: 4154870 (1979-05-01), Wakefield
patent: 4241022 (1980-12-01), Kraus et al.
patent: 4292344 (1981-07-01), McHale
patent: 4314525 (1982-02-01), Hsu et al.
patent: 4327069 (1982-04-01), Cheng
"Silane Pyrolysis in a Free-Space Reactor," by James R. Lay & Sridhar K. Iya, Proc. of the 15th IEEE Photovoltaic Specialists Conference, Jun. 1981, pp. 565-568.
"The Effect of a Growing Aerosol on the Rate of Homogeneous Nucleation of a Vapor," by Andrew J. Pesthy, Richard C. Flagan & John H. Seinfeld, Journal of Colloid and Interface Science, vol. 82, No. 2, Aug. 1981, pp. 465-479.
"On the Modeling of Silane Pyrolysis in a Continuous Flow Reactor" by Ananda K. Praturi, Ravi Jain & George C. Hsu, Low-Cost Solar Array Project, DOE/JPL-1012-21.
"Capacitively-Heated Fluidized Bed, Preferential Heating of Seed Particles Aids Silicon Production" by E. J. McHale, NASA Tech Briefs, Spring 1981.
"The Behavior of Constant Rate Aerosol Reactors" by S. K. Friedlander Aerosol Science and Technology (1980) pp. 3-13.
"Aggregation and Growth of Submicron Oxide Particles in Flames" by Gail D. Ulrich and John W. Riehl, Journal of Colloid and Interface Science, vol. 87, No. 1, May 1982, pp. 257-265.

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